Title :
A lateral modes model for BAW resonators
Author :
Collado, C. ; Rocas, E. ; Verdu, J. ; Mateu, J. ; Hueltes, A. ; Aigner, Robert
Author_Institution :
Univ. Politec. de Catalunya, Barcelona, Spain
Abstract :
An equivalent circuit model to predict lateral modes occurring in real BAW resonators is proposed. The circuit model has been validated with FEM simulations of FBAR resonators and also with measurements of SMR resonators. The model allows to predict the electrical response of square-shaped and rectangular-shaped resonators without limitation on dimensions.
Keywords :
acoustic resonators; bulk acoustic wave devices; finite element analysis; BAW resonators; FBAR resonators; FEM simulations; SMR resonator; bulk acoustic wave resonator; electrical response; equivalent circuit model; lateral mode model; rectangular-shaped resonators; square-shaped resonators; Couplings; Finite element analysis; Impedance; Integrated circuit modeling; Power transmission lines; Resonant frequency; Solid modeling; Bulk Acoustic Wave; circuit model; lateral modes; resonator;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0370
