DocumentCode
129823
Title
A lateral modes model for BAW resonators
Author
Collado, C. ; Rocas, E. ; Verdu, J. ; Mateu, J. ; Hueltes, A. ; Aigner, Robert
Author_Institution
Univ. Politec. de Catalunya, Barcelona, Spain
fYear
2014
fDate
3-6 Sept. 2014
Firstpage
1497
Lastpage
1500
Abstract
An equivalent circuit model to predict lateral modes occurring in real BAW resonators is proposed. The circuit model has been validated with FEM simulations of FBAR resonators and also with measurements of SMR resonators. The model allows to predict the electrical response of square-shaped and rectangular-shaped resonators without limitation on dimensions.
Keywords
acoustic resonators; bulk acoustic wave devices; finite element analysis; BAW resonators; FBAR resonators; FEM simulations; SMR resonator; bulk acoustic wave resonator; electrical response; equivalent circuit model; lateral mode model; rectangular-shaped resonators; square-shaped resonators; Couplings; Finite element analysis; Impedance; Integrated circuit modeling; Power transmission lines; Resonant frequency; Solid modeling; Bulk Acoustic Wave; circuit model; lateral modes; resonator;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location
Chicago, IL
Type
conf
DOI
10.1109/ULTSYM.2014.0370
Filename
6932281
Link To Document