Title :
Impact of gamma irradiation on GaN/sapphire surface acoustic wave resonators
Author :
Shankar, Ashwin ; Chih-Ming Lin ; Angadi, Chetan ; Bhattacharya, Surya ; Broad, Nicholas ; Senesky, Debbie G.
Author_Institution :
Electr. Eng. Dept., Stanford Univ., Stanford, CA, USA
Abstract :
Space environments contain harsh conditions such as extreme temperature variations, high levels of radiation, and mechanical shocks. Resonator components made from quartz are susceptible to such environmental conditions so that complex packaging and shielding are typically required. As alternative to quartz, wide bandgap material platforms, such as gallium nitride (GaN), are being investigated due to their tolerance to harsh environments and high acoustic velocities. This paper presents the characterization of GaN/sapphire surface acoustic wave (SAW) resonators upon gamma irradiation. Microfabricated resonators were exposed to prolonged gamma ray radiation with (up to 850 krad) and the reflection characteristics (S11) were obtained before irradiation, after irradiation, and after thermal annealing at 100°C. The measured frequency response of the irradiated GaN/sapphire structures showed negligible shift in the resonance frequency (229 MHz). However, a decrease in the resonance peak intensity with increasing irradiation levels is observed. The state of the crystalline structure before and after irradiation (100 krad) is examined using rocking curve X-ray diffraction (XRD) analysis.
Keywords :
III-V semiconductors; X-ray diffraction; acoustic wave reflection; annealing; crystal structure; gallium compounds; gamma-ray effects; micromechanical resonators; sapphire; surface acoustic wave resonators; wide band gap semiconductors; GaN-Al2O3; GaN-sapphire SAW resonators; GaN-sapphire surface acoustic wave resonators; XRD; acoustic velocity; complex packaging; crystalline structure; environmental conditions; frequency 229 MHz; gamma ray irradiation impact; harsh environments; irradiated GaN-sapphire structures; mechanical shocks; microfabricated resonators; radiation levels; reflection characteristics; resonance peak frequency; resonance peak intensity; resonator components; rocking curve X-ray diffraction; space environments; temperature 100 degC; thermal annealing; wide bandgap material platforms; Annealing; Gallium nitride; Radiation effects; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location :
Chicago, IL
DOI :
10.1109/ULTSYM.2014.0639