Title :
Patterning for planar waveguides
Author :
Ballato, J. ; Agarwala, M. ; Riman, R.E.
Author_Institution :
Dept. of Ceramic Sci. & Eng., Rutgers Univ., Piscataway, NJ
fDate :
1/2/1997 12:00:00 AM
Abstract :
The synthesis of planar strip geometries for planar waveguides by a layered manufacturing technique, called fused deposition modelling (FDMTM), is presented. Channels were deposited on silicon wafers by melting a thermoplastic polymer and extruding it through a small orifice. Sol-gel-derived, amorphous fluoride films were dip-coated into these channels and yielded straight, 1 mm strips on subsequent removal of the polymer
Keywords :
coating techniques; fluoride glasses; integrated optoelectronics; optical fabrication; optical planar waveguides; OEIC; Si wafers; amorphous fluoride films; dip-coating; extruding; fused deposition modelling; layered manufacturing technique; patterned fluoride films; planar photonic devices; planar strip geometries; planar waveguide patterning; sol-gel-derived films; thermoplastic polymer;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19970034
