DocumentCode :
1299131
Title :
Electron microscope scans area a fraction of the size of a pinhead
Volume :
82
Issue :
12
fYear :
1963
Firstpage :
738
Lastpage :
738
Abstract :
Scientists at the Westinghouse Research Laboratories, Pittsburgh, Pa., can now map, in the finest detail, areas no larger than 0.001 square inch in size on the surface of tiny electronic devices, by means of a scanning electron microscope.
fLanguage :
English
Journal_Title :
Electrical Engineering
Publisher :
ieee
ISSN :
0095-9197
Type :
jour
DOI :
10.1109/EE.1963.6541821
Filename :
6541821
Link To Document :
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