Title :
Broadband microstrip patch antenna on micromachined silicon substrates
Author :
Zheng, M. ; Chen, Q. ; Hall, P.S. ; Fusco, V.F.
Author_Institution :
Sch. of Electron. & Electr. Eng., Birmingham Univ., UK
fDate :
1/8/1998 12:00:00 AM
Abstract :
A micromachined rectangular cavity-backed microstrip patch antenna has been developed on high resistivity silicon wafers. This novel path antenna has a much reduced effective dielectric constant and wide bandwidth
Keywords :
micromachining; microstrip antennas; Si; bandwidth; broadband rectangular cavity-backed microstrip patch antenna; effective dielectric constant; high resistivity silicon wafer; micromachined silicon substrate; path antenna;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980077
