Title :
Plasma Sheet Generated by Microwave Discharge at Atmospheric Pressure
Author :
Jasinski, Mariusz ; Mizeraczyk, Jerzy
Author_Institution :
Centre for Plasma & Laser Eng., Szewalski Inst. of Fluid-Flow Machinery, Gdansk, Poland
Abstract :
In this paper, we present an argon plasma sheet produced at atmospheric pressure using a waveguide-based microwave (2.45-GHz) generator. The unique shape of the plasma sheet is very suitable for surface treatment; thus, it is attractive for industry.
Keywords :
high-frequency discharges; microwave generation; plasma materials processing; plasma production; surface treatment; frequency 2.45 GHz; microwave discharge; plasma sheet generation; pressure 1 atm; surface treatment; waveguide-based microwave generator; Argon; Microwave FET integrated circuits; Microwave integrated circuits; Microwave measurements; Plasma sources; Surface treatment; Microwave plasma; nonequilibrium plasma; plasma sheet; surface treatment;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2162006
