MOEMS Accelerometer Based on Microfiber Knot Resonator

Author

Wu, Yu ; Zeng, Xu ; Rao, Yun-Jiang ; Gong, Yuan ; Hou, Chang-Lun ; Yang, Guo-Guang

Author_Institution

Key Lab. of Broadband Opt. Fiber Transm. & Commun. Networks (Educ. Minist. of China), Univ. of Electron. Sci. & Technol. of China, Chengdu, China

Volume

21

Issue

20

fYear

2009

Firstpage

1547

Lastpage

1549

Abstract

A microelectromechanical system (MEMS)-based optical accelerometer combined with a microfiber knot resonator (MKR) is proposed and demonstrated. The 386-mum-diameter MKR, fabricated by a 1.1-mu m-diameter microfiber, has a high quality factor (Q-factor) of 8500 and acts as the sensing device for vibration measurement of the MEMS structure. The experimental results show that such an accelerometer has a sensitivity of 654.7 mV/g, and a dynamic range of 20 g. This sensitivity can be further improved by increasing the Q-factor of the MKR, which can be achieved by optimizing the optical and geometrical parameters of the microfiber.

Keywords

Q-factor; accelerometers; fibre optic sensors; micro-optomechanical devices; microsensors; optical resonators; vibration measurement; MOEMS accelerometer; accelerometer sensitivity; microelectromechanical system; microfiber knot resonator; optical accelerometer; quality factor; sensing device; vibration measurement; Accelerometer; high $Q$-factor; microfiber knot resonator (MKR); microoptoelectromechanical system (MOEMS);

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2009.2029556

Filename

5208300