DocumentCode
1302160
Title
Statistics of Resistance Drift Due to Structural Relaxation in Phase-Change Memory Arrays
Author
Boniardi, Mattia ; Ielmini, Daniele ; Lavizzari, Simone ; Lacaita, Andrea L. ; Redaelli, Andrea ; Pirovano, Agostino
Author_Institution
Dipt. di Elettron. e Inf., Politec. di Milano, Milan, Italy
Volume
57
Issue
10
fYear
2010
Firstpage
2690
Lastpage
2696
Abstract
The phase-change memory (PCM), based on the reversible phase transition in a chalcogenide material, is among the most attractive memory concepts for next-generation nonvolatile memories. Due to the metastable nature of the amorphous state, the memory can exhibit a time variation of resistance after programming as a result of two main mechanisms: 1) structural relaxation (SR), which is an atomic rearrangement to minimize the defect density, and 2) crystallization of the amorphous chalcogenide. SR has been mostly studied at the single-cell level, whereas a statistical analysis and modeling is necessary for device reliability estimation and prediction. This work studies the statistical behavior of SR in PCM devices, through experimental and modeling approaches. Statistical SR data from PCM arrays are shown, and a Monte Carlo model for SR statistics is proposed, based on previous physical modeling of the SR process. This model allows for long-term, physics-based, and array-level reliability extrapolations in large PCM arrays.
Keywords
amorphous semiconductors; phase change memories; random-access storage; semiconductor device models; semiconductor device reliability; statistical analysis; Monte Carlo model; PCM; SR statistics; amorphous chalcogenide crystallization; array-level reliability extrapolations; chalcogenide material; defect density; device reliability estimation; next-generation nonvolatile memories; phase-change memory arrays; resistance drift; reversible phase transition; single-cell level; statistical analysis; structural relaxation; Annealing; Arrays; Crystallization; Electrical resistance measurement; Phase change materials; Resistance; Strontium; Amorphous semiconductors; chalcogenide glasses; nonvolatile memory (NVM); phase-change memory (PCM); reliability estimation; structural relaxation (SR);
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2010.2058771
Filename
5555961
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