Title :
Future media manufacturing-more than just conventional sputtering
Author :
Cord, B. ; Scherer, J.
Author_Institution :
Balzers Process Syst. GmbH, Alzenau, Germany
Abstract :
Trends for further developments in vacuum processing of hard disks are discussed. Future tools should offer extended process capabilities such as in situ substrate cleaning, deposition of multilayer structures, fast ramping of substrate temperature, and high energy deposition. The design challenge will be to adapt these steps-many of them already used in other vacuum applications-to the 2-5 s process times common in disk manufacturing.
Keywords :
hard discs; sputter deposition; surface cleaning; vacuum deposition; 2 to 5 s; disk manufacturing; extended process capabilities; hard disks; high energy deposition; in situ substrate cleaning; multilayer structures; substrate temperature; vacuum processing; Cleaning; Costs; Hard disks; Heating; Manufacturing; Nonhomogeneous media; Sputtering; Substrates; Surface contamination; Surface treatment;
Journal_Title :
Magnetics, IEEE Transactions on
