DocumentCode
1302659
Title
Future media manufacturing-more than just conventional sputtering
Author
Cord, B. ; Scherer, J.
Author_Institution
Balzers Process Syst. GmbH, Alzenau, Germany
Volume
36
Issue
1
fYear
2000
Firstpage
67
Lastpage
72
Abstract
Trends for further developments in vacuum processing of hard disks are discussed. Future tools should offer extended process capabilities such as in situ substrate cleaning, deposition of multilayer structures, fast ramping of substrate temperature, and high energy deposition. The design challenge will be to adapt these steps-many of them already used in other vacuum applications-to the 2-5 s process times common in disk manufacturing.
Keywords
hard discs; sputter deposition; surface cleaning; vacuum deposition; 2 to 5 s; disk manufacturing; extended process capabilities; hard disks; high energy deposition; in situ substrate cleaning; multilayer structures; substrate temperature; vacuum processing; Cleaning; Costs; Hard disks; Heating; Manufacturing; Nonhomogeneous media; Sputtering; Substrates; Surface contamination; Surface treatment;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.824427
Filename
824427
Link To Document