Title :
Ultrathin amorphous C:H overcoats by pCVD on thin film media
Author :
Yamamoto, Takayuki ; Toyoguchi, Takashi ; Honda, Fumihiro
Author_Institution :
File Memory Lab., Fujitsu Labs. Ltd., Atsugi, Japan
Abstract :
A summary of the material and tribological properties of amorphous carbon films for the overcoat of thin film media is presented. Two families of film are considered. One is the family of sputtered DLC film including amorphous carbon, amorphous hydrogenated, and nitrogenated carbon films, which are all widely used as overcoats for commercially available thin film media. The other film is amorphous hydrogenated carbon film, which is deposited by hot filament plasma CVD and is being developed for next generation overcoats.
Keywords :
amorphous state; carbon; corrosion protective coatings; hard discs; hydrogen; magnetic recording; plasma CVD; plasma CVD coatings; tribology; wear resistant coatings; C:H; amorphous hydrogenated carbon films; filament plasma CVD; magnetic head-disc interface; material properties; rigid discs; sputtered DLC film; thin film media; tribological properties; ultrathin amorphous C:H overcoats; Amorphous materials; Chemical vapor deposition; Corrosion; Diamond-like carbon; Displays; Magnetic films; Plasma applications; Plasma chemistry; Sputtering; Transistors;
Journal_Title :
Magnetics, IEEE Transactions on
