Ultrathin amorphous C:H overcoats by pCVD on thin film media

Author

Yamamoto, Takayuki ; Toyoguchi, Takashi ; Honda, Fumihiro

Author_Institution

File Memory Lab., Fujitsu Labs. Ltd., Atsugi, Japan

Volume

36

Issue

1

fYear

2000

Firstpage

115

Lastpage

119

Abstract

A summary of the material and tribological properties of amorphous carbon films for the overcoat of thin film media is presented. Two families of film are considered. One is the family of sputtered DLC film including amorphous carbon, amorphous hydrogenated, and nitrogenated carbon films, which are all widely used as overcoats for commercially available thin film media. The other film is amorphous hydrogenated carbon film, which is deposited by hot filament plasma CVD and is being developed for next generation overcoats.

Keywords

amorphous state; carbon; corrosion protective coatings; hard discs; hydrogen; magnetic recording; plasma CVD; plasma CVD coatings; tribology; wear resistant coatings; C:H; amorphous hydrogenated carbon films; filament plasma CVD; magnetic head-disc interface; material properties; rigid discs; sputtered DLC film; thin film media; tribological properties; ultrathin amorphous C:H overcoats; Amorphous materials; Chemical vapor deposition; Corrosion; Diamond-like carbon; Displays; Magnetic films; Plasma applications; Plasma chemistry; Sputtering; Transistors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.824435

Filename

824435