DocumentCode
1302749
Title
Generation of 1180 Å period gratings with a Xe ion laser
Author
Hoenk, M.E. ; Bridges, W.B. ; Vahala, Kerry ; Yariv, Amnon
Volume
24
Issue
22
fYear
1988
fDate
10/27/1988 12:00:00 AM
Firstpage
1366
Lastpage
1367
Abstract
Holographic lithography with the 2315 Å line of a xenon ion laser is used to produce gratings in polymethylmethacrylate. An 1180 Å period grating is made and examined with a scanning electron microscope (SEM). This grating period is appropriate for use as a first-order grating with a GaAs distributed feedback laser
Keywords
holographic gratings; ion lasers; 1180 A; Xe; Xe ion laser; distributed feedback laser; first-order grating; gratings; holographic lithography; period grating; polymethylmethacrylate; scanning electron microscope;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
Filename
82444
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