Title :
Generation of 1180 Å period gratings with a Xe ion laser
Author :
Hoenk, M.E. ; Bridges, W.B. ; Vahala, Kerry ; Yariv, Amnon
fDate :
10/27/1988 12:00:00 AM
Abstract :
Holographic lithography with the 2315 Å line of a xenon ion laser is used to produce gratings in polymethylmethacrylate. An 1180 Å period grating is made and examined with a scanning electron microscope (SEM). This grating period is appropriate for use as a first-order grating with a GaAs distributed feedback laser
Keywords :
holographic gratings; ion lasers; 1180 A; Xe; Xe ion laser; distributed feedback laser; first-order grating; gratings; holographic lithography; period grating; polymethylmethacrylate; scanning electron microscope;
Journal_Title :
Electronics Letters
