Title :
Laser-direct-written capacitors and inductors for GaAs monolithic microwave integrated circuit trimming
Author :
Chen, C.L. ; Black, J.G. ; Doran, S.P. ; Mahoney, L.J. ; Murphy, R.A. ; Ehrlich, D.J.
Author_Institution :
MIT, Lexington, MA
fDate :
10/27/1988 12:00:00 AM
Abstract :
Laser-direct-write deposition of tungsten and laser ablation techniques have been successfully used to modify monolithic capacitors and inductors fabricated on GaAs substrates. The properties of the tungsten inductors and capacitors have been characterised at microwave frequencies and are in good agreement with theory. The new techniques permit post-fabrication tuning with precision and versatility that are not achievable by any other method
Keywords :
III-V semiconductors; MMIC; capacitors; gallium arsenide; inductors; integrated circuit technology; laser beam applications; tuning; GaAs; III-V semiconductors; W; laser ablation techniques; laser direct write deposition; monolithic capacitors; monolithic inductors; monolithic microwave integrated circuit; post-fabrication tuning; postfabrication tuning; trimming;
Journal_Title :
Electronics Letters
