DocumentCode
1304232
Title
Precise interferometric AO method for SAW velocity measurements in an anisotropic solid
Author
Kolosovsky, Evgeny A. ; Tsarev, Andrei V. ; Yakovkin, Igor B.
Author_Institution
Inst. of Semicond. Phys., Novosibirsk, Russia
Volume
44
Issue
6
fYear
1997
Firstpage
1219
Lastpage
1223
Abstract
We suggest an original method utilizing a two beam optical interferometer for the accurate SAW velocity measurements in an anisotropic solid. Namely, two parallel and spatially separated optical beams are diffracted from different points along the path of SAW propagation. Then at the output of the interferometer light beams of different orders (0, /spl plusmn/1) reflecting from the surface with SAW are combined in pairs to create the interference patterns. Measurement of the interference pattern´s intensity oscillations versus the SAW frequency gives all needed information to determine the phase and the group SAW velocities and their dispersion. Experimental software includes: statistical data accumulation with auto correction of the interferometer phase change caused by a change of the external conditions, and Fourier analysis of interferometer signal spectrum with the use of generalized variables taking into account the SAW dispersion. The experimental error depends on the experimental peculiarities and is about 0.5 m/s for the phase velocity and 3 m/s for the group velocity. The method is tested by SAW velocity measurements on ST-quartz with a thin film of Al.
Keywords
acoustic wave velocity measurement; acousto-optical effects; light interferometry; surface acoustic waves; Al; Al thin film; Fourier analysis; SAW velocity measurement; ST-quartz; SiO/sub 2/; anisotropic solid; dispersion; group velocity; phase velocity; statistical data accumulation; two beam acousto-optical interferometry; Anisotropic magnetoresistance; Geometrical optics; Interference; Optical beams; Optical diffraction; Optical films; Optical interferometry; Solids; Surface acoustic waves; Velocity measurement;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.656624
Filename
656624
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