Characterization and imaging of SAW grooved transducer acoustic field by SLAM

Author

Anisimkin, Vladimir I. ; Luprano, Vincenza A M ; Penza, Michele ; Montagna, Giovanni ; Morozov, Anatoly I.

Author_Institution

Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia

Volume

44

Issue

6

fYear

1997

Firstpage

1232

Lastpage

1238

Abstract

Quantitative characterization of the surface acoustic field radiated forward, backward, and in orthogonal directions by the grooved transducer, implemented onto a glass substrate, is accomplished by a scanning laser acoustic microscope (SLAM) operating at 31 MHz. The surface acoustic wave (SAW) amplitude is measured as a function of the number of grooves and the position of the bulk acoustic wave (BAW) transducer. The number of the operating grooves efficiently contributing to the SAW response is estimated. Remarkable reflection of the SAW beam between two identical gratings is observed.

Keywords

acoustic field; acoustic microscopy; surface acoustic wave transducers; 31 MHz; SAW grooved transducer; acoustic field imaging; scanning laser acoustic microscope; Acoustic imaging; Acoustic measurements; Acoustic transducers; Acoustic waves; Glass; Microscopy; Position measurement; Simultaneous localization and mapping; Surface acoustic waves; Surface emitting lasers;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/58.656626

Filename

656626