Results of a multi-site round-robin to examine probed measurements of an impedance standard substrate

The results from a round-robin measurement using microwave coplanar waveguide probes are presented. The round robin was initiated and coordinated by the TRW Equipment Management Center´s Measurement Engineering Department (MED). Ten probe sites, within and outside of TRW, participated in the round-robin. Each participant used the same Cascade Microtech impedance standard substrate, the same measurement and calibration structures, the same calibration method, and the same network analyzer conditions. S-parameter measurements were performed over the frequency range of 0.045-26.5 GHz on a 10-dB attenuator and a 20-dB attenuator. In addition to the data comparison between the various probe sites, measurement repeatability results obtained by TRW are presented