Title :
Induced optical reflectivity by local variation of conductivity in MIS structures
Author :
Englert, Thad J. ; Blesi, Jonathan W.
Author_Institution :
Dept. of Electr. Eng., Wyoming Univ., Laramie, WY, USA
fDate :
3/1/1990 12:00:00 AM
Abstract :
Calculations based on theoretical models of metal-insulator-semiconductor structures show that moderate applied potentials can cause sufficiently large induced inversion charge carrier densities at the semiconductor surface to yield reflectivities approaching 100% at the insulator-semiconductor interface. Using p-type silicon as the semiconductor material, positive gate potentials up to 10 V applied to the metal give reflectivities from approximately 15 to nearly 100%. The dependent of doping concentration, insulator thickness, and gate voltage are shown
Keywords :
carrier density; electrical conductivity of solids; inversion layers; metal-insulator-semiconductor structures; reflectivity; semiconductor doping; 10 V; MIS structures; conductivity; doping concentration; induced inversion charge carrier densities; insulator thickness; insulator-semiconductor interface; local variation; metal-insulator-semiconductor structures; moderate applied potentials; optical reflectivity; p type Si; positive gate potentials; semiconductor surface; theoretical models; Conductivity; Electron optics; Insulation; Optical materials; Optical modulation; Optical refraction; Optical sensors; Permittivity; Reflectivity; Semiconductor materials;
Journal_Title :
Quantum Electronics, IEEE Journal of