A 2 $,\times,$ 2 Split Cross-Bar Optical Switch Using a Hybrid Actuation Configuration

In this paper, a 2 × 2 split cross-bar optical switch which employs a hybrid actuation configuration is presented. The main advantages of this proposed switch include low actuation voltage, low power consumption, and easy fiber alignment. This optical switch consists of a micromachined micro-mirror structure and a mini-actuator module. The micro-mirror structure, which comprises two movable vertical mirrors with cantilevers, two fixed vertical mirrors, and light-path trenches, is realized by using a simple KOH silicon etching process. The mini-actuator module, which includes two commercially-available electromagnetic bistable actuators attached with L-shaped arms, is used to actuate micro-mirrors. The measured insertion losses of the proposed switch is between -1- -1.2 dB, the cross-talk is about -60 dB, and the switching time is less than 13 ms. The long-term reliability test of the SCB switch is performed by continuously actuating the device for 10 000 cycles at 1 Hz, and the deviation of the measured insertion loss is less than 0.05 dB.