DocumentCode
1306801
Title
Purposes of three-dimensional circuits
Author
Terao, Akira ; Van de Wiele, Fernand
Author_Institution
Catholic Univ., Louvain-la-Neuve, Belgium
Volume
3
Issue
6
fYear
1987
Firstpage
31
Lastpage
33
Abstract
Three-dimensional (3-D) circuitry is a recognized concept. With the advent of silicon-on-insulator (SOI) technologies, this idea is being realized using techniques such as laser recrystallization of polysilicon, which allows fabrication of active devices stacked in two or more layers. Since silicon is a well-known microelectronic material, progress has been very fast and some laboratories have already succeeded in producing three-dimensional circuit cells [1]-[3]. In order to focus activity and rationally optimize products, technologists need to know the types of circuits required. This paper examines the problem from several points of view and tries to answer three fundamental questions: (1) What are the main advantages of 3-D circuitry? (2) What kind of circuits will yield best advantages? (3) Which technological problems have priority?
fLanguage
English
Journal_Title
Circuits and Devices Magazine, IEEE
Publisher
ieee
ISSN
8755-3996
Type
jour
DOI
10.1109/MCD.1987.6323178
Filename
6323178
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