Title :
A review on fabrication technologies for the monolithic integration of tapers with III-V semiconductor devices
Author :
Moerman, Ingrid ; Van Daele, Peter P. ; Demeester, Piet M.
Author_Institution :
Dept. of Inf. Technol., Ghent Univ., Belgium
fDate :
12/1/1998 12:00:00 AM
Abstract :
The past few years a lot of effort has been put in the development and fabrication of III-V semiconductor waveguiding devices with monolithic integrated mode size converters (tapers). By integrating a taper with a waveguide device, the coupling losses and the packaging cost of OEICs in future fiber-optical networks can be much reduced. This paper gives an overview of different taper designs, the possible fabrication technologies and performances of tapered devices
Keywords :
integrated circuit packaging; integrated optoelectronics; optical communication equipment; optical fabrication; optical waveguides; reviews; III-V semiconductor devices; III-V semiconductor waveguiding devices; OEIC; coupling losses; fabrication technologies; fiber-optical networks; monolithic integrated mode size converters; monolithic integration; packaging cost; review; taper designs; tapered devices; tapers; Costs; Fabrication; III-V semiconductor materials; Monolithic integrated circuits; Optical fiber devices; Optical refraction; Optical variables control; Optical waveguides; Semiconductor device packaging; Semiconductor waveguides;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/2944.658785
