Title :
Yield improvement of a large area magnetic field sensor array using redundancy schemes
Author :
Audet, Yves ; Chapman, Glenn H.
Author_Institution :
Sch. of Eng. Sci., Simon Fraser Univ., Burnaby, BC, Canada
fDate :
3/1/1997 12:00:00 AM
Abstract :
The circuit design of a large area magnetic field sensor array (LAMSA) is described. This prototype is developed for applications in magnetic field mapping and tactile sensor arrays. To enable the production of such a large sensor system, redundancy schemes are implemented and a laser interconnection post fabrication technique is used for fault repairs. The design restructurable capabilities rely on local redundancy schemes for the sensor grid and global redundancy schemes for the surrounding control circuits. Experimental results obtained on a laser restructurable subarray of magnetic field sensor cells are shown. A study of the robustness of the local sensor grid redundancy schemes is presented.
Keywords :
integrated circuit interconnections; integrated circuit yield; laser beam applications; magnetic field measurement; magnetic sensors; redundancy; tactile sensors; wafer-scale integration; LAMSA; control circuits; design restructurable capabilities; fault repairs; global redundancy schemes; large area magnetic field sensor array; laser interconnection post fabrication technique; laser restructurable subarray; local redundancy schemes; magnetic field mapping; redundancy schemes; sensor grid; tactile sensor arrays; yield improvement; Circuit synthesis; Integrated circuit interconnections; Magnetic sensors; Production systems; Prototypes; Redundancy; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Tactile sensors;
Journal_Title :
Very Large Scale Integration (VLSI) Systems, IEEE Transactions on