• DocumentCode
    1308967
  • Title

    Low threshold and high uniformity for novel 1.3-μm-strained InGaAsP MQW DC-PBH LDs fabricated by the all-selective MOVPE technique

  • Author

    Sakata, Y. ; Inomoto, Y. ; Saito, D. ; Komatsu, K. ; Hasumi, H.

  • Author_Institution
    ULSI Device Dev. Lab., NEC Corp., Otsu, Japan
  • Volume
    9
  • Issue
    3
  • fYear
    1997
  • fDate
    3/1/1997 12:00:00 AM
  • Firstpage
    291
  • Lastpage
    293
  • Abstract
    1.3-μm-strained InGaAsP multiquantum-well (MQW) double-channel planar buried heterostructure laser diodes (DC-PBH-LDs) were fabricated by all-selective metalorganic vapor phase epitaxy (MOVPE). In the fabrication process, the strained MQW active layer and current-blocking structures were directly formed by selective MOVPE without a semiconductor etching process. A low-threshold current (I/sub th/=2.6 mA@25/spl deg/C for 200-μm-long 70%-90% facets) and excellent high-temperature operation (T0=84 K, 25/spl deg/C-60/spl deg/C and T0=70 K, 25/spl deg/C-85/spl deg/C) were achieved. Furthermore, extremely uniform threshold current and slope efficiency were observed, The median time to failure for these LDs was estimated to be more than 100000 h under the 85/spl deg/C-5 mW aging condition.
  • Keywords
    III-V semiconductors; ageing; gallium arsenide; gallium compounds; indium compounds; infrared sources; laser transitions; life testing; optical fabrication; optical testing; quantum well lasers; semiconductor device testing; semiconductor growth; vapour phase epitaxial growth; /spl mu/m-strained InGaAsP MQW DC-PBH LDs; 1.3 mum; 100000 h; 2.6 mA; 200 mum; 25 C; 25 to 60 C; 25 to 80 C; 5 mW; 84 K; InGaAsP; InGaAsP multiquantum-well double-channel planar buried heterostructure laser diodes; aging condition; all-selective MOVPE technique; all-selective metalorganic vapor phase epitaxy; current-blocking structures; extremely uniform threshold current; fabrication process; failure; high uniformity; high-temperature operation; low threshold; low-threshold current; slope efficiency; strained MQW active layer; Aging; Diode lasers; Epitaxial growth; Epitaxial layers; Etching; National electric code; Optical device fabrication; Optical fiber networks; Quantum well devices; Threshold current;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/68.556050
  • Filename
    556050