Title :
Micromachining of high-contrast optical waveguides in [111] silicon wafers
Author :
Pandraud, G. ; Veldhuis, G. ; Berenschot, J.W. ; Nijdam, A.J. ; Hoekstra, H.J.W.M. ; Parriaux, O. ; Lambeck, P.V.
Author_Institution :
Bookham Technol. Ltd., Abington, UK
fDate :
3/1/2000 12:00:00 AM
Abstract :
A fabrication technique by KOH etching for very thin free standing plane parallel silicon bridges in a [111] silicon wafer is presented. The applications of such a stress free slab as an evanescent optical waveguide sensor of unusually high sensitivity are discussed.
Keywords :
etching; micromachining; optical fabrication; optical planar waveguides; optical sensors; sensitivity; silicon; (111) silicon wafer; (111) silicon wafers; KOH; KOH etching; Si; evanescent optical waveguide sensor; high-contrast optical waveguides; micromachining; optical fabrication technique; stress free slab; unusually high sensitivity; very thin free standing plane parallel silicon bridges; Bridges; Etching; Micromachining; Optical device fabrication; Optical sensors; Optical surface waves; Optical waveguides; Silicon; Slabs; Stress;
Journal_Title :
Photonics Technology Letters, IEEE
