Title :
Nondestructive measurement of phase velocity of surface acoustic waves using matched filters
Author_Institution :
Device Technol. Res Lab., Sony Corp., Kanagawa, Japan
fDate :
3/15/1990 12:00:00 AM
Abstract :
A technique for measuring SAW velocity on unprocessed wafers placed on patterns of matched filters made on a glass plate is reported. The velocity measured on quartz agrees with the value measured destructively. The relative error of +or-110 p.p.m. means that this is currently the most precise nondestructive measuring technique.
Keywords :
matched filters; materials testing; nondestructive testing; quartz; surface acoustic waves; ultrasonic velocity measurement; glass plate; matched filters; measurement technique; measuring SAW velocity; nondestructive measurement; nondestructive measuring technique; phase velocity; quartz; surface acoustic waves; unprocessed wafers;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19900268
