Optical fibre microbending sensors by micromachining techniques

A practical tactile sensor using micromachined techniques has been implemented and evaluated. Optical fibres laid on the pedestals of micromachined silicon showed outstanding improvement in sensitivity, mechanical decoupling between fibres and excellent repeatability. The upper cover made from plastic and Cu-Be foils, not only provides a protective membrane to the sensor but also acts as the force concentrator, allowing better force point resolution.