DocumentCode
1309638
Title
Optical fibre microbending sensors by micromachining techniques
Author
Chao, J.H.C. ; Nevdeck, G.W.
Author_Institution
Purdue Univ., West Lafayette, IN, USA
Volume
26
Issue
8
fYear
1990
fDate
4/14/1990 12:00:00 AM
Firstpage
513
Lastpage
515
Abstract
A practical tactile sensor using micromachined techniques has been implemented and evaluated. Optical fibres laid on the pedestals of micromachined silicon showed outstanding improvement in sensitivity, mechanical decoupling between fibres and excellent repeatability. The upper cover made from plastic and Cu-Be foils, not only provides a protective membrane to the sensor but also acts as the force concentrator, allowing better force point resolution.
Keywords
fibre optic sensors; mechanoception; tactile sensors; Cu-Be foils; CuBe-Si; Si pedestals; force concentrator; force point resolution; mechanical decoupling; microbending sensors; micromachining techniques; optical fibre sensors; protective membrane; repeatability; sensitivity; tactile sensor; upper plastic cover;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19900334
Filename
82717
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