Title :
Silicon Filled Integrated Waveguides
Author :
Gentile, G. ; Dekker, Ronald ; De Graaf, Pascal ; Spirito, M. ; Pelk, M.J. ; de Vreede, L.C.N. ; Salmassi, B. Rejaei
Author_Institution :
DIMES Inst., Delft Univ. of Technol., Delft, Netherlands
Abstract :
In this letter, we report, for the first time, a silicon-filled integrated waveguide based on a two mask integrated circuit (IC) process and substrate transfer technique. The fabrication process offers a high degree of control and repeatability on the device geometrical dimensions. Waveguide structures with cutoff frequencies of 35, 50, and 77 GHz were designed and fabricated. In the fundamental TE10-like operating mode, average losses as low as 0.10 dB/mm with a slow-wave factor of 2.5 were observed. The measurement results are in excellent agreement with HFSS simulations, validating the usability of these structures as a new component in mm-wave IC-designs.
Keywords :
MIMIC; substrate integrated waveguides; HFSS simulations; MIMIC; frequency 35 GHz; frequency 50 GHz; frequency 77 GHz; silicon filled integrated waveguides; slow-wave factor; substrate transfer; waveguide structures; Coplanar waveguides; Integrated circuits; Optical waveguides; Silicon; Substrates; Transmission line measurements; Waveguide transitions; Millimeter-wave; silicon filled; silicon-on-glass; substrate integrated waveguide (SIW); substrate transfer;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2010.2063420
