Economical clean dry air system for closed manufacturing system

Author

Ishihara, Yoshio ; Nakajima, Daiji ; Ohmi, Tadahiro

Author_Institution

Nippon Sanso Corp., Tsukuba, Japan

Volume

13

Issue

1

fYear

2000

fDate

2/1/2000 12:00:00 AM

Firstpage

16

Lastpage

23

Abstract

We demonstrated that the organic carbon contaminants influenced the J-E characteristics of a gate oxide. Molecular-contamination-free clean dry air (CDA) is a choice for the atmosphere control in a closed manufacturing system. The adsorption and desorption characteristics, which are important items for the design and operation of CDA production plants, were confirmed with both a dynamic simulation and a pilot column. Based on the results, we built a CDA plant with a capacity of 4000 m³/h, and confirmed that each contamination concentration was less than 10 ppb. We also proposed the economical CDA system using a power recycle device which has been newly developed. Using this CDA system, it is possible to reduce the power consumption in the CDA plant. Also, it is possible to realize the circulation of the used CDA without generating more contamination or power consumption

Keywords

ULSI; clean rooms; integrated circuit economics; integrated circuit yield; semiconductor process modelling; CDA production plants; J-E characteristics; adsorption characteristics; atmosphere control; closed manufacturing system; desorption characteristics; dry air system; dynamic simulation; gate oxide; molecular-contamination-free air; organic carbon contaminants; pilot column; power consumption; power recycle device; Atmosphere; Atmospheric modeling; Contamination; Control systems; Energy consumption; Manufacturing systems; Power generation economics; Power system economics; Production; Recycling;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/66.827336

Filename

827336