Title :
Adaptive optimization of run-to-run controllers: the EWMA example
Author :
Patel, Nital S. ; Jenkins, Steven T.
Author_Institution :
Texas Instrum. Inc., Dallas, TX, USA
fDate :
2/1/2000 12:00:00 AM
Abstract :
This paper presents a recursive scheme for optimizing the gain of an exponentially weighted moving average (EWMA) controller under stability constraints. The objective is to minimize the asymptotic mean square error in the output with minimal a priori information. The algorithm hinges on a simple representation of the optimal EWMA gain. Both step and drift disturbances are considered. It is shown that the gain sequence generated by the algorithm always yields a stable system. Furthermore, this sequence is shown to converge to a suboptimal value. Extensions to the algorithm to the case where there is model uncertainty are also presented. The algorithm is verified via simulation. Data from a manufacturing implementation are presented
Keywords :
adaptive control; batch processing (industrial); exponential distribution; feedback; integrated circuit manufacture; moving average processes; optimisation; recursive estimation; semiconductor process modelling; statistical process control; suboptimal control; uncertain systems; adaptive optimization; asymptotic mean square error; batch-to-batch feedback control; drift disturbances; exponentially weighted moving average controller; gain optimization; high volume fab; manufacturing implementation; minimal a priori information; optimal gain; process model; recursive scheme; run-to-run controllers; simulation; stability constraints; step disturbances; stochastic approximation; suboptimal value; tuning algorithm; uncertain system gain; Adaptive control; Application specific integrated circuits; Automatic control; Feedback control; Noise measurement; Programmable control; Semiconductor device manufacture; Semiconductor device noise; Stability; Working environment noise;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on