• DocumentCode
    1310265
  • Title

    Adaptive optimization of run-to-run controllers: the EWMA example

  • Author

    Patel, Nital S. ; Jenkins, Steven T.

  • Author_Institution
    Texas Instrum. Inc., Dallas, TX, USA
  • Volume
    13
  • Issue
    1
  • fYear
    2000
  • fDate
    2/1/2000 12:00:00 AM
  • Firstpage
    97
  • Lastpage
    107
  • Abstract
    This paper presents a recursive scheme for optimizing the gain of an exponentially weighted moving average (EWMA) controller under stability constraints. The objective is to minimize the asymptotic mean square error in the output with minimal a priori information. The algorithm hinges on a simple representation of the optimal EWMA gain. Both step and drift disturbances are considered. It is shown that the gain sequence generated by the algorithm always yields a stable system. Furthermore, this sequence is shown to converge to a suboptimal value. Extensions to the algorithm to the case where there is model uncertainty are also presented. The algorithm is verified via simulation. Data from a manufacturing implementation are presented
  • Keywords
    adaptive control; batch processing (industrial); exponential distribution; feedback; integrated circuit manufacture; moving average processes; optimisation; recursive estimation; semiconductor process modelling; statistical process control; suboptimal control; uncertain systems; adaptive optimization; asymptotic mean square error; batch-to-batch feedback control; drift disturbances; exponentially weighted moving average controller; gain optimization; high volume fab; manufacturing implementation; minimal a priori information; optimal gain; process model; recursive scheme; run-to-run controllers; simulation; stability constraints; step disturbances; stochastic approximation; suboptimal value; tuning algorithm; uncertain system gain; Adaptive control; Application specific integrated circuits; Automatic control; Feedback control; Noise measurement; Programmable control; Semiconductor device manufacture; Semiconductor device noise; Stability; Working environment noise;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/66.827349
  • Filename
    827349