Excellent Selector Characteristics of Nanoscale $\hbox {VO}_{2}$ for High-Density Bipolar ReRAM Applications

We herein present a nanoscale vanadium oxide (VO₂) device with excellent selector characteristics such as a high on/off ratio (>; 50), fast switching speed (<; 20 ns), and high current density (>; 10⁶ A/cm2). Owing to extrinsic defects, a large-area device with a 20-nm-thick VO₂ layer underwent an electrical short. In contrast, after scaling the device active area (<; 5 × 10⁴ nm²), excellent switching uniformity was obtained. This can be explained by the reduced defects and the metal-insulator transition of the whole nanoscale VO₂. By integrating a bipolar resistive random access memory device with the VO₂ selection device, a significantly improved readout margin was obtained. The VO₂ selection device shows good potential for cross-point bipolar resistive memory applications.