Title :
Detached Glow Above a Titanium Hollow Cathode Sputter Source
Author :
Niedrist, Raimund ; Schrittwieser, Roman
Author_Institution :
Inst. for Ion Phys. & Appl. Phys., Univ. of Innsbruck, Innsbruck, Austria
Abstract :
A simple argon hollow cathode (HC) was investigated as a plasma source and a sputtering source for titanium. The HC consists of a Ti cylinder. There are two different modes of operation: a low-current discharge with the typical pink bluish argon glow and the high-current HC discharge mode. In the latter case, an intensive glow was observed at the upper end of the Ti cathode. Under certain conditions, this glow was observed to float freely between cathode and anode ring.
Keywords :
anodes; cathodes; glow discharges; plasma sheaths; titanium; Ti; anode; high-current HC discharge mode; low-current discharge; pink bluish argon glow; plasma sheaths; plasma source; sputtering source; titanium hollow cathode sputter source; Argon; Cathodes; Discharges; Fasteners; Fault location; Plasmas; Sputtering; Gas discharge devices; glow discharge; plasma properties; plasma sheaths; plasma sources;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2162855
