DocumentCode :
1311922
Title :
Thick films or thin?
Author :
Thun, Rudolf E.
Author_Institution :
Raytheon Company
Volume :
6
Issue :
10
fYear :
1969
Firstpage :
73
Lastpage :
79
Abstract :
It is sometimes difficult to decide between thick-film and thin-film technologies in the fabrication of hybrid integrated circuits consisting of a ceramic substrate with deposited passive components and attached active devices. In the case of thick films, the deposited pattern of conductors, resistors, capacitors, and inductors is applied to the substrate by screen-printing and firing special conductive, resistive, or dielectric pastes. Thin-film layers, on the other hand, are deposited in vacuum by evaporation or cathode-sputtering of appropriate source materials. This article discusses the advantages and disadvantages of both technologies as well as their application ranges.
Keywords :
Conducting materials; Conductive films; Dielectric substrates; Dielectric thin films; Fabrication; Integrated circuit technology; Sputtering; Thick films; Thin film circuits; Thin film devices;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.1969.5214122
Filename :
5214122
Link To Document :
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