DocumentCode
1312956
Title
n-AlInAs/(InAs)3(GaAs)1 superlattice modulation-doped field effect transistor grown by molecular beam epitaxy
Author
Nishiyama, Naoto ; Yano, Hiroyuki ; Nakajima, Shigeru ; Hayashi, H.
Author_Institution
Sumitomo Electr. Ind. Ltd., Yokohama, Japan
Volume
26
Issue
13
fYear
1990
fDate
6/21/1990 12:00:00 AM
Firstpage
885
Lastpage
886
Abstract
A pseudomorphic modulation-doped field effect transistor (MODFET) using a (InAs)3(GaAs)1 superlattice as a channel layer has been successfully demonstrated. The device was grown by molecular beam epitaxy. The MODFET with 0.85 mu m gate length exhibits maximum external DC transconductance and current gain cut-off frequency of 475 mS/mm and 28.5 GHz, respectively.
Keywords
III-V semiconductors; aluminium compounds; gallium arsenide; high electron mobility transistors; indium compounds; molecular beam epitaxial growth; semiconductor growth; semiconductor superlattices; 0.85 micron; 28.5 GHz; AlInAs-(InAs) 3(GaAs); MODFET; channel layer; current gain cut-off frequency; gate length; maximum external DC transconductance; modulation-doped field effect transistor; molecular beam epitaxy; superlattice;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19900578
Filename
82827
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