Fiber-Based White-Light Interferometry for Nanoscale Distance Measurement and Control

Author

Lee, Aram ; Zhang, Baigang ; Ma, Cheng ; Wang, Anbo ; Xu, Yong

Author_Institution

Bradley Dept. of Electr. & Comput. Eng., Virginia Tech, Blacksburg, VA, USA

Volume

24

Issue

23

fYear

2012

Firstpage

2136

Lastpage

2138

Abstract

We present a fiber-based white-light interferometry system capable of nanoscale distance measurement and control. Our prototype contains two cleaved single mode fibers tightly clamped together. Using a supercontinuum white-light source, we can achieve distance control with a standard deviation of <; 4 nm. This method is potentially suitable for applications that require noncontact measurements or that involve highly deformable structures.

Keywords

distance measurement; light interferometry; measurement by laser beam; optical control; optical fibre couplers; supercontinuum generation; fiber-based white-light interferometry; highly deformable structures; nanoscale distance control; nanoscale distance measurement; noncontact measurements; standard deviation; supercontinuum white-light source; tightly clamped cleaved single mode fibers; Correlation; Microscopy; Mirrors; Nanoscale devices; Optical fiber devices; Optical interferometry; Probes; Distance control; optical path length (OPL); piezo-stage; white-light interferometry (WLI);

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2012.2223206

Filename

6327329