Title :
Detecting and preventing measurement errors
Author :
Jenkins, Keith A.
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
Abstract :
Modern e-beam probers may be as convenient to use as oscilloscopes, but their measurements can be misleading or even erroneous. The author warns of potential problems and suggests ways to prevent and cure faulty readings
Keywords :
VLSI; electron beam testing; integrated circuit testing; measurement errors; VLSI circuits; e-beam probers; e-beam probing; faulty readings; measurement errors; Circuit testing; Crosstalk; Detectors; Electron beams; Instruments; Measurement errors; Probes; Scanning electron microscopy; Very large scale integration; Voltage;
Journal_Title :
Design & Test of Computers, IEEE
