Title :
Integrated-optic interferometric microdisplacement sensor in glass with thermo-optic phase modulation
Author :
Baus, A. ; Voges, E.
fDate :
7/19/1990 12:00:00 AM
Abstract :
A compact and stable integrated-optic Michelson-interferometer for 0.633 mu m wavelength operation with ion exchanged waveguides in glass is demonstrated for optical displacement measurement. The integration of thermo-optic modulators allows the combined detection of fast movement with orthogonal signals, and high-resolution (1 nm) displacement detection with optical heterodyning.
Keywords :
displacement measurement; integrated optics; light interferometry; phase modulation; 0.633 micron; 1 nm displacement detection; compact interferometer; detection of fast movement; integrated-optic Michelson-interferometer; interferometric microdisplacement sensor; ion exchanged waveguides in glass; optical displacement measurement; optical heterodyning; orthogonal signals; stable interferometer; thermo-optic phase modulation;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19900740