Title :
High-resolution PEA charge distribution measurement system
Author :
Maeno, Takashi ; Fukunaga, Kaori
Author_Institution :
Commun. Res. Lab., Minist. of Posts & Telecommun., Tokyo, Japan
fDate :
12/1/1996 12:00:00 AM
Abstract :
The pulsed electroacoustic (PEA) method is widely known to be an excellent method for measuring the space charge distribution that accumulates in thick dielectric materials (1 to 5 mm). We have refined the PEA measurement system for use on thin dielectric materials. With FFT deconvolution to compensate for the frequency characteristics of the piezoelectric sensor, the resolution in the depth direction is improved to ~3 μm. This improved system is thus expected to be useful for the quantitative and nondestructive measurement of the space charge distribution in dielectric films
Keywords :
deconvolution; dielectric measurement; dielectric thin films; fast Fourier transforms; nondestructive testing; space charge; FFT deconvolution; PEA method; depth direction; dielectric films; frequency characteristics; nondestructive measurement; pulsed electroacoustic method; space charge distribution; thin dielectric materials; Charge measurement; Current measurement; Deconvolution; Dielectric materials; Dielectric measurements; Pulse measurements; Pulsed electroacoustic methods; Refining; Space charge; Thickness measurement;
Journal_Title :
Dielectrics and Electrical Insulation, IEEE Transactions on
