Title :
Low-loss silicon-based hybrid plasmonic waveguide with an air nanotrench for sub-wavelength mode confinement
Author :
Yalin Su ; Zheng Zheng ; Yusheng Bian ; Ya Liu ; Jiansheng Liu ; Jinsong Zhu ; Tao Zhou
Author_Institution :
Sch. of Electron. & Inf. Eng., Beihang Univ., Beijing, China
fDate :
8/1/2011 12:00:00 AM
Abstract :
A hybrid plasmonic waveguide based on a silicon-on-insulator substrate with an air trench is proposed and investigated. Theoretical analysis demonstrates that the nano-scale air trench could result in strong local field enhancement and tight mode confinement. Besides, the transmission loss of the fundamental hybrid plasmonic mode could also be reduced despite the existence of the high-index silicon rib. The proposed structure is compatible with standard nanofabrication process based on the silicon wafers and could enable various nanophotonic integrated components.
Keywords :
elemental semiconductors; integrated optics; nanophotonics; optical losses; optical waveguides; plasmonics; silicon; Si; Si-SiO2; air nanotrench; high-index silicon rib; low-loss silicon-based hybrid plasmonic waveguide; nanofabrication process; nanophotonic integrated components; silicon wafers; silicon-on-insulator substrate; subwavelength mode confinement; transmission loss;
Journal_Title :
Micro & Nano Letters, IET
DOI :
10.1049/mnl.2011.0298