Title :
Electrostatic activation of micromechanical resonators
Author_Institution :
Dept. of Electron. & Electr. Eng., Univ. Coll., London, UK
Abstract :
Micromechanical resonators have been fabricated and driven into mechanical vibration by application of a time-dependent potential difference of less than 1 V. A laser beam guided via a fibre optic coupler was used to detect the mechanical vibration.
Keywords :
electrostatic devices; fibre optic sensors; micromechanical devices; resonators; vibration measurement; 1 V; electrostatic resonator activation; fibre optic coupler; fibre optic sensors; laser beam; mechanical vibration; micromechanical resonators; time-dependent potential difference;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19910107
