• DocumentCode
    1318868
  • Title

    A dose rate independent pMOS dosimeter for space applications

  • Author

    Schwank, J.R. ; Roeske, S.B. ; Beutler, D.E. ; Moreno, D.J. ; Shaneyfelt, M.R.

  • Author_Institution
    Sandia Nat. Labs., Albuquerque, NM, USA
  • Volume
    43
  • Issue
    6
  • fYear
    1996
  • fDate
    12/1/1996 12:00:00 AM
  • Firstpage
    2671
  • Lastpage
    2678
  • Abstract
    A dual-dielectric pMOS dosimeter (RADFET) has been recently designed at Sandia. The RADFET consists of a thermally grown oxide and a CVD deposited nitride. With a negatively applied bias, holes are generated in the SiO2 transport and are trapped at the SiO 2/Si3N4 interface producing a measurable threshold-voltage shift. Because holes are trapped away from the Si/SiO2 interface, hole neutralization by tunneling and interface-trap buildup are minimized resulting in little fade or annealing of the RADFET output response. RADFETs were irradiated at dose rates from 0.002 to 50 rad(Si)/s with biases from -5 to -20 V. RADFETs were also annealed for times up to 107 s at temperatures up to 100°C. Within experimental uncertainty, no difference in RADFET output response at a given bias was observed over the dose rate range examined and for 25°C anneals. At an anneal temperature of 100°C only a 20% decrease in RADFET output response was observed. These results show that Sandia´s RADFETs exhibit little or no fade of their output characteristics and are ideal for low dose rate space applications
  • Keywords
    MOSFET; annealing; chemical vapour deposition; dosimeters; electron traps; elemental semiconductors; interface states; silicon; silicon compounds; space vehicle electronics; -5 to -20 V; 25 to 100 degC; CVD deposited nitride; RADFET; Si-SiO2-Si3N4; anneal temperature; annealing; dose rate independent instrument; dose rate range; dual-dielectric dosimeter; hole neutralization; interface-trap buildup; measurable threshold-voltage shift; negatively applied bias; output characteristics; output response; pMOS dosimeter; space applications; thermally grown oxide; Annealing; Electron traps; Gamma rays; Laboratories; Monitoring; Packaging; Silicon; Substrates; Temperature; Tunneling;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/23.556852
  • Filename
    556852