DocumentCode :
1318868
Title :
A dose rate independent pMOS dosimeter for space applications
Author :
Schwank, J.R. ; Roeske, S.B. ; Beutler, D.E. ; Moreno, D.J. ; Shaneyfelt, M.R.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Volume :
43
Issue :
6
fYear :
1996
fDate :
12/1/1996 12:00:00 AM
Firstpage :
2671
Lastpage :
2678
Abstract :
A dual-dielectric pMOS dosimeter (RADFET) has been recently designed at Sandia. The RADFET consists of a thermally grown oxide and a CVD deposited nitride. With a negatively applied bias, holes are generated in the SiO2 transport and are trapped at the SiO 2/Si3N4 interface producing a measurable threshold-voltage shift. Because holes are trapped away from the Si/SiO2 interface, hole neutralization by tunneling and interface-trap buildup are minimized resulting in little fade or annealing of the RADFET output response. RADFETs were irradiated at dose rates from 0.002 to 50 rad(Si)/s with biases from -5 to -20 V. RADFETs were also annealed for times up to 107 s at temperatures up to 100°C. Within experimental uncertainty, no difference in RADFET output response at a given bias was observed over the dose rate range examined and for 25°C anneals. At an anneal temperature of 100°C only a 20% decrease in RADFET output response was observed. These results show that Sandia´s RADFETs exhibit little or no fade of their output characteristics and are ideal for low dose rate space applications
Keywords :
MOSFET; annealing; chemical vapour deposition; dosimeters; electron traps; elemental semiconductors; interface states; silicon; silicon compounds; space vehicle electronics; -5 to -20 V; 25 to 100 degC; CVD deposited nitride; RADFET; Si-SiO2-Si3N4; anneal temperature; annealing; dose rate independent instrument; dose rate range; dual-dielectric dosimeter; hole neutralization; interface-trap buildup; measurable threshold-voltage shift; negatively applied bias; output characteristics; output response; pMOS dosimeter; space applications; thermally grown oxide; Annealing; Electron traps; Gamma rays; Laboratories; Monitoring; Packaging; Silicon; Substrates; Temperature; Tunneling;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/23.556852
Filename :
556852
Link To Document :
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