Title :
Total dose effects on Microelectromechanical Systems (MEMS): accelerometers
Author :
Lee, C.I. ; Johnston, A.H. ; Tang, W.C. ; Barnes, C.E. ; Lyke, J.
Author_Institution :
Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
fDate :
12/1/1996 12:00:00 AM
Abstract :
Microelectromechanical sensors, ADXL50 and XMMAS40G accelerometers which are fabricated with surface micromachining techniques are characterized for their total dose radiation response. Different failure mechanisms were observed when the sensor element or the whole device was irradiated
Keywords :
accelerometers; failure analysis; gamma-ray effects; micromachining; microsensors; proton effects; accelerometers; failure mechanisms; gamma-ray effects; microelectromechanical sensors; microelectromechanical systems; proton beam effects; sensor element; surface micromachining techniques; total dose radiation response; Acceleration; Accelerometers; Biosensors; Chemical technology; Laboratories; Microelectromechanical systems; Micromechanical devices; Propulsion; Sensor phenomena and characterization; Space technology;
Journal_Title :
Nuclear Science, IEEE Transactions on
