DocumentCode
1319827
Title
Total dose effects on Microelectromechanical Systems (MEMS): accelerometers
Author
Lee, C.I. ; Johnston, A.H. ; Tang, W.C. ; Barnes, C.E. ; Lyke, J.
Author_Institution
Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
Volume
43
Issue
6
fYear
1996
fDate
12/1/1996 12:00:00 AM
Firstpage
3127
Lastpage
3132
Abstract
Microelectromechanical sensors, ADXL50 and XMMAS40G accelerometers which are fabricated with surface micromachining techniques are characterized for their total dose radiation response. Different failure mechanisms were observed when the sensor element or the whole device was irradiated
Keywords
accelerometers; failure analysis; gamma-ray effects; micromachining; microsensors; proton effects; accelerometers; failure mechanisms; gamma-ray effects; microelectromechanical sensors; microelectromechanical systems; proton beam effects; sensor element; surface micromachining techniques; total dose radiation response; Acceleration; Accelerometers; Biosensors; Chemical technology; Laboratories; Microelectromechanical systems; Micromechanical devices; Propulsion; Sensor phenomena and characterization; Space technology;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/23.556915
Filename
556915
Link To Document