• DocumentCode
    1321377
  • Title

    Microwave-Induced Metallization Damage and Surface Shorts in Semiconductors

  • Author

    Amadori, Robert A. ; Simons, Mayrant

  • Author_Institution
    Naval Weapons Laboratory, Dahlgren, Va. 22448.
  • Issue
    3
  • fYear
    1971
  • Firstpage
    196
  • Lastpage
    197
  • Abstract
    Although considerable research on semiconductor failure modes has been done, a search of the literature indicates that very little of this work relates to microwave frequencies. Two types of microwave-induced failure modes have been observed: metallization damage and A1 migration along the Si-SiO2 interface.
  • Keywords
    Failure analysis; Frequency; Impedance; Laboratories; Manufacturing; Metallization; Physics; Testing; Voltage; Weapons;
  • fLanguage
    English
  • Journal_Title
    Reliability, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9529
  • Type

    jour

  • DOI
    10.1109/TR.1971.5216127
  • Filename
    5216127
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1321377