DocumentCode
1321688
Title
Annealing Temperature and Co Layer Thickness Dependence of Magnetoresistance Effect for 
-MnGa/Co/MgO/CoFeB Perpendicular Magnetic Tunnel Junctions
Author
Ma, Q.L. ; Kubota, T. ; Mizukami, S. ; Zhang, X.M. ; Oogane, M. ; Naganuma, H. ; Ando, Y. ; Miyazaki, T.
Author_Institution
WPI Adv. Inst. for Mater. Res., Tohoku Univ., Sendai, Japan
Volume
48
Issue
11
fYear
2012
Firstpage
2808
Lastpage
2811
Abstract
The post annealing temperature and Co thickness dependence of tunnel magnetoresistance (TMR) ratio was investigated for L10-MnGa/Co(tCo)/MgO/CoFeB perpendicular magnetic tunnel junctions (MTJs). The MnGa/MgO interface optimization by Co insertion was shown to be an effective way for improving the TMR ratio. The TMR value increases with the annealing temperature (Ta), and exhibits maxima at 325 °C for tCo = 1.0 - 5.0 nm. Thermal annealing process improves the structure of MTJs, but also causes elements diffusion. In this work, the annealing effect on MTJs with different Co thicknesses was discussed in detail along with a fast annealing method.
Keywords
annealing; boron alloys; cobalt; cobalt alloys; gallium alloys; iron alloys; magnesium compounds; magnetic multilayers; manganese alloys; tunnelling magnetoresistance; Co insertion; Co layer thickness dependence; MnGa-Co-MgO-CoFeB; MnGa-Co-MgO-CoFeB perpendicular magnetic tunnel junctions; MnGa-MgO interface optimization; annealing effect; element diffusion; fast annealing method; magnetic tunnel junction structure; magnetoresistance effect; post annealing temperature dependence; size 1 nm to 5 nm; temperature 325 degC; thermal annealing process; tunnel magnetoresistance ratio; Annealing; Junctions; Magnetic tunneling; Magnetization; Magnetoresistance; Manganese; $L1_{0}$ MnGa; perpendicular magnetic tunnel junctions (MTJs);
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.2012.2196420
Filename
6332842
Link To Document