Parametric multiphysics static models for a bridge type MEMS capacitive switch

The design of RF MEMS switches is a challenging task due to the various multiphysics coupled phenomena that have to be taken into consideration. In order to reach a configuration with specific requirements, dynamical compact models are needed, that should be accurate enough and have few degrees of freedom, so that the simulation of an entire system in which such a device is embedded need reasonable computer resources, measured in time and memory requirements. In order to allow the design and optimization tasks, these models have to be correlated with design parameters such as dimensions and material properties. This paper focuses on the path from coupled structural-electrostatic models to the extraction of relevant information for the design, namely the static pull-in voltage and the effective stiffness coefficient, for a capacitive switch of bridge type. The influence of the width of the actuation pads and the length of the bridge is investigated.