Dynamic Characteristics of Novel Two-DOF Resonant Actuator by Vector Control

This paper proposes a two degree-of-freedom (DOF) resonant actuator and clarifies its dynamic characteristics. The feature of this two-DOF actuator is that the movement of each x- and z-axis is independently controlled by vector control. In this paper, dynamic characteristics of the actuator were confirmed through 3-D finite-element method and measurement. In single axis drive, it was found that amplitude of each x and z-axis was independently controlled by vector control. On the other hand, the amplitude of each axis is almost equal to single axis drive without mutual interference in biaxial drive. The measured results agree well with analyzed one. From these results, the effectiveness of the proposed two-DOF resonant actuator was verified.