Wet-etched ridge waveguides in y-cut lithium niobate

Author

Cheng, Rei-Shin ; Wang, Tzyy-Jiann ; Wang, Way-Seen

Author_Institution

Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan

Volume

15

Issue

10

fYear

1997

fDate

10/1/1997 12:00:00 AM

Firstpage

1880

Lastpage

1887

Abstract

By the technique of nickel indiffusion proton exchange (NIPE) and the technique of buffered proton exchange (PE) melt, wet-etched ridge waveguides in y-cut LiNbO₃ are fabricated for the first time. The fabricated ridge waveguides have smooth surfaces and are good enough for low-loss waveguides. Moreover, a ridge waveguide Mach-Zehnder modulator in y-cut LiNbO₃ is fabricated. The measured half-wave voltage is about 30% lower than that of a conventional modulator. The wet-etched ridge waveguides in y-cut and z-cut substrates are also characterized for comparison

Keywords

Mach-Zehnder interferometers; electro-optical modulation; etching; ion exchange; lithium compounds; optical fabrication; optical losses; optical waveguides; ridge waveguides; substrates; LiNbO₃; buffered proton exchange melt; fabricated ridge waveguides; half-wave voltage; low-loss waveguide; nickel indiffusion proton exchange; ridge waveguide Mach-Zehnder modulator; smooth surfaces; wet-etched ridge waveguides; y-cut LiNbO₃; y-cut substrates; z-cut substrates; Dry etching; Hafnium; Lithium niobate; Optical surface waves; Optical waveguides; Protons; Sputter etching; Substrates; Surface waves; Wet etching;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.633578

Filename

633578