• DocumentCode
    1324653
  • Title

    Laser-induced melting of thin conducting films. I. The adiabatic approximation

  • Author

    Cohen, Simon S. ; Wyatt, Peter W. ; Chapman, Glenn H.

  • Author_Institution
    MIT, Lincoln Lab., Lexington, MA, USA
  • Volume
    38
  • Issue
    9
  • fYear
    1991
  • fDate
    9/1/1991 12:00:00 AM
  • Firstpage
    2042
  • Lastpage
    2050
  • Abstract
    The authors explore the thermal characteristics of an isolated metallic film which is subjected to a short pulse of laser radiation. The main feature of such an adiabatic system is that no steady-state solution is possible. This means that the molten zone dimensions depend on the pulse duration length and also on the temperature dependence of the influencing parameters (essentially, the thermal diffusivity). The authors use available models for the temperature-dependent conductivity and diffusivity to compare the theoretical results with experimental data obtained from a quasi-adiabatic system
  • Keywords
    laser beam effects; melting; metallic thin films; metallisation; thermal diffusivity; adiabatic approximation; isolated metallic film; laser induced melting; molten zone dimensions; pulse duration length; temperature dependence; temperature-dependent conductivity; thermal characteristics; thermal diffusivity; thin conducting films; Conductive films; Fuses; Integrated circuit technology; Laser applications; Laser beam cutting; Laser beams; Laser modes; Laser theory; Optical pulses; Silicon;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.83728
  • Filename
    83728