DocumentCode
1324653
Title
Laser-induced melting of thin conducting films. I. The adiabatic approximation
Author
Cohen, Simon S. ; Wyatt, Peter W. ; Chapman, Glenn H.
Author_Institution
MIT, Lincoln Lab., Lexington, MA, USA
Volume
38
Issue
9
fYear
1991
fDate
9/1/1991 12:00:00 AM
Firstpage
2042
Lastpage
2050
Abstract
The authors explore the thermal characteristics of an isolated metallic film which is subjected to a short pulse of laser radiation. The main feature of such an adiabatic system is that no steady-state solution is possible. This means that the molten zone dimensions depend on the pulse duration length and also on the temperature dependence of the influencing parameters (essentially, the thermal diffusivity). The authors use available models for the temperature-dependent conductivity and diffusivity to compare the theoretical results with experimental data obtained from a quasi-adiabatic system
Keywords
laser beam effects; melting; metallic thin films; metallisation; thermal diffusivity; adiabatic approximation; isolated metallic film; laser induced melting; molten zone dimensions; pulse duration length; temperature dependence; temperature-dependent conductivity; thermal characteristics; thermal diffusivity; thin conducting films; Conductive films; Fuses; Integrated circuit technology; Laser applications; Laser beam cutting; Laser beams; Laser modes; Laser theory; Optical pulses; Silicon;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.83728
Filename
83728
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