Explosion model applied to an intense pulsed plasma source for thin film deposition

Author

Pedrow, Patrick D. ; Goyal, Kumud O. ; Mabalingham, R. ; Osman, Mohamed A.

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Washington State Univ., Pullman, WA, USA

Volume

25

Issue

1

fYear

1997

fDate

2/1/1997 12:00:00 AM

Firstpage

89

Lastpage

96

Abstract

A pulsed plasma source for deposition of thin polymer films was modeled numerically with the one-dimensional (1-D) time dependent fluid transport equations describing an explosion for an ideal gas. Initial number density, explosion temperature, and velocity were made consistent with values in an experimental reactor. These quantities as well as pressure and fluence were modeled for a distance of 2 m and for a time duration of 93 μs. The trajectory for maximum pressure calculated from the model was observed to be consistent with the experimentally measured trajectory of maximum emitted light from an acetylene plasma. Measured axial profiles of areal density for the deposited polymer films were compared with modeled fluence

Keywords

explosions; plasma deposition; plasma transport processes; polymer films; acetylene plasma; areal density axial profiles; explosion model; explosion temperature; ideal gas explosion; initial number density; intense pulsed plasma source; light emission; modeled fluence; numerical modeling; one-dimensional time dependent fluid transport equations; pulsed plasma source; thin film polymer deposition; velocity; Equations; Explosions; Inductors; Numerical models; Plasma density; Plasma measurements; Plasma sources; Plasma temperature; Polymer films; Pressure measurement;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.557490

Filename

557490