DocumentCode
1325968
Title
Travelling-wave piezoelectric micropump with low resistance microchannel
Author
Zhang, Wensheng ; Wang, Chingyue ; Yue, Zhao ; Zhan, C.N. ; Geng, W.D. ; Liu, G.H.
Author_Institution
Coll. of Inf. Tech. Sci., Nankai Univ., Tianjin, China
Volume
47
Issue
19
fYear
2011
Firstpage
1065
Lastpage
1066
Abstract
Driven by a travelling wave, a piezoelectric micropump with a sawtooth microchannel is presented. An easy fabrication method is proposed, and the characteristics of the micropump are tested at different frequencies. Compared to the micropump with a straight microchannel, the micropump with a sawtooth microchannel has higher flow rate and back pressure (33.36 l/min and 1.13 kPa) at low voltage because of the low resistance of the microchannel. Meanwhile, the relationship of the flow rate to the back pressure of the micropump is in inverse proportion.
Keywords
lab-on-a-chip; microchannel flow; microfabrication; micropumps; piezoelectric devices; testing; back pressure; fabrication method; flow rate; microfluidic chip; micropump testing; pressure 1.13 kPa; sawtooth microchannel; travelling-wave piezoelectric micropump;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2011.2035
Filename
6025134
Link To Document