DocumentCode

1326620

Title

"Functional\´\´ tantalum integrated circuits

Volume

4

Issue

10

fYear

1967

Firstpage

11

Lastpage

11

Keywords

Capacitors; Conductive films; Dielectric substrates; Dielectric thin films; Electrodes; Reliability engineering; Resistors; Thin film circuits;

fLanguage

English

Journal_Title

Spectrum, IEEE

Publisher

ieee

ISSN

0018-9235

Type

jour

DOI

10.1109/MSPEC.1967.5217112

Filename

5217112