Title :
High-speed electret charging using vacuum UV photoionization [Reprint]
Author :
Honzumi, M. ; Hagiwara, Kazuki ; Iguchi, Yoshinori ; Suzuki, Yuya
Author_Institution :
Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan
Abstract :
In this letter, we propose a high-speed charging method using vacuum ultraviolet (vuv) irradiation, which can increase the charging rate by two orders of magnitudes than corona/soft-x-ray charging methods. So far, vuv has been used for neutralization of electrostatic charge in semiconductor process. However, the large ion current obtained with the VUV irradiation has never been used for charging electrets.
Keywords :
electrets; photoionisation; ultraviolet radiation effects; CYTOP CTL-M electrets; VUV irradiation; electrostatic charge; high-speed charging method; high-speed electret charging; ion current; ionization current; neutralization; semiconductor process; vacuum UV photoionization; vacuum ultraviolet irradiation; Corona; Electrets; Electric potential; Ionization; Radiation effects; Space charge; Surface charging; Ultraviolet sources;
Journal_Title :
Electrical Insulation Magazine, IEEE
DOI :
10.1109/MEI.2011.6025372
