Activation energy of source-drain current in hydrogenated and unhydrogenated polysilicon thin-film transistors

The activation energy of the drain current in polysilicon thin-film transistors (TFTs) and the effects of hydrogenation on this energy are discussed. The activation energy data are fitted using different models of the density of states in the material. It is shown that a model which assumes a distribution of brand tail states and localized deep states can account for the activation energy data of unhydrogenated polysilicon TFTs. However, the activation energy data on hydrogenated TFTs cannot be explained with the band tail model. Instead, a simple model of deep states localized at the grain boundary can fit this data quite accurately. Also, it is shown that there is a characteristic kink in the activation energy data of the hydrogenated TFTs which is a signature of the location of the deep states relative to the valence band edge. Analysis indicates that these deep states are located approximately 0.36 eV from the valence band edge. This value is consistent with that obtained from absorption measurements using photothermal deflection spectroscopy